이은한  김태우  변세기  서두원  황효정  백주은  정의순  김한성  이신근

Vol. 29,  No. 2, pp. 126-134, Jun.  2023
10.7464/ksct.2023.29.2.126

Nitrous oxide N2O decomposition Direct catalytic decomposition Noble metal-free catalyst γ-Al2O3

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Direct catalytic decomposition is a promising method for controlling the emission of nitrous oxide (N2O) from the semiconductor and display industries. In this study, a γ-Al2O3 catalyst was developed to reduce N2O emissions by a catalytic decomposition reaction. The γ-Al2O3 catalyst was prepared by an extrusion method using boehmite powder, and a N2O decomposition test was performed using a catalyst reactor that was approximately 25.4 mm (1 in) in diameter packed with approximately 5 mm of catalysts. The N2O decomposition tests were carried out with approximately 1% N2O at 550 to 750 ℃, an ambient pressure, and a GHSV=1800-2000 h-1. To confirm the N2O decomposition properties and the effect of O2 and steam on the N2O decomposition, nitrogen, air, and air and steam were used as atmospheric gases. The catalytic decomposition tests showed that the 1% N2O had almost completely disappeared at 700 ℃ in an N2 atmosphere. However, air and steam decreased the conversion rate drastically. The long term stability test carried out under an N2 atmosphere at 700 ℃ for 350 h showed that the N2O conversion rate remained very stable, confirming no catalytic activity changes. From the results of the N2O decomposition tests and long-term stability test, it is expected that the prepared γ-Al2O3 catalyst can be used to reduce N2O emissions from several industries including the semiconductor, display, and nitric acid manufacturing industry.