Oxidation Process for the Etching Solution Regeneration of Ferric Chloride Using Liquid and Solid Oxidizing Agent 


Vol. 23,  No. 2, pp. 158-162, Jun.  2017
10.7464/ksct.2017.23.2.158


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  Abstract

FeCl3 solution has been used as an etchant for metal etching such as Fe, Cu, Al and Ni. In the etching process, Fe3+ is reduced to Fe2+ and the etching efficiency is decreased. Waste FeCl3 etchant has environmental, economic problems and thus the regeneration of the etching solution has been required. In this study, HCl was mixed with the FeCl2 solution and then, H2O2, NaClO3 were added into the mixed solution to oxidize the Fe2+. During the oxidation process, oxidation-reduction potential (ORP) was measured and the relationship between ORP and oxidation ratio was investigated. The ORP is increased with increasing the concentration of H2O2 and NaClO3, and then the ORP is decreased with oxidation progress. Such a behavior was in good agreement with Nernst’s equation. Also, the oxidation efficiency was about 99% when a sufficient amount of HCl and H2O2, NaClO3 were added.

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  Cite this article

[IEEE Style]

K. DW, P. IJ, K. GH, C. BM, L. SW, C. HL, J. HC, "Oxidation Process for the Etching Solution Regeneration of Ferric Chloride Using Liquid and Solid Oxidizing Agent," Clean Technology, vol. 23, no. 2, pp. 158-162, 2017. DOI: 10.7464/ksct.2017.23.2.158.

[ACM Style]

Kim DW, PArk IJ, Kim GH, Chae BM, Lee SW, Choi HL, and Jung HC. 2017. Oxidation Process for the Etching Solution Regeneration of Ferric Chloride Using Liquid and Solid Oxidizing Agent. Clean Technology, 23, 2, (2017), 158-162. DOI: 10.7464/ksct.2017.23.2.158.

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

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