Application of a Divided-Wall Column for the Trichlorosilane Refining Process 


Vol. 16,  No. 1, pp. 64-70, Mar.  2010


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  Abstract

In this study, we suggest the application of the divided-wall column (DWC) to the existing trichlorosilane(TCS) purification process in the commercial polysilicon manufacturing process. Using Aspen HYSYS V7.1, an extensive simulation study was carried out for the analysis of the energy consumptions and capital cost for the conventional sequential distillation configuration and the DWC for producing a given purity and yield of trichlorosilane. As a result, it is shown that the DWC saves the separation energy by 61% and the equipment cost by 58% compared with the conventional distillation process.

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  Cite this article

[IEEE Style]

H. S and L. M, "Application of a Divided-Wall Column for the Trichlorosilane Refining Process," Clean Technology, vol. 16, no. 1, pp. 64-70, 2010. DOI: .

[ACM Style]

Hong S and Lee M. 2010. Application of a Divided-Wall Column for the Trichlorosilane Refining Process. Clean Technology, 16, 1, (2010), 64-70. DOI: .

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

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