A study on the optimized coagulation for separation of liquid and solid from CMP waste 


Vol. 7,  No. 1, pp. 27-34, Mar.  2001


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  Abstract

The waste slurry generated from CMP process contains particulate and heavy metals. It is hard to treat the waste slurry by conventional treatment method because the particulates in the waste are too fine to be easily separated the solid from the waste for the purpose of water recycling. The investigation was focused on finding the optimum condition of coagulation with two different coagulants. When the solid content in the waste slurry solution was 0.1wt%, the optimal ranges of pH and PACl concentration were 4~6 and 20~50 mg/L, respectively. When the solid content was increased to 0.5wt%, the optimal condition was 4~5 for pH and 50~100 mg/L for PACl concentration.

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  Cite this article

[IEEE Style]

H. S and O. S, "A study on the optimized coagulation for separation of liquid and solid from CMP waste," Clean Technology, vol. 7, no. 1, pp. 27-34, 2001. DOI: .

[ACM Style]

Hong S and Oh S. 2001. A study on the optimized coagulation for separation of liquid and solid from CMP waste. Clean Technology, 7, 1, (2001), 27-34. DOI: .

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지