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Effect of Alcohols on the Dry Etching of Sacrificial SiO2 in Supercritical CO2
Kim DH  Jang MJ  Lim KT
Vol. 18, No. 3, pp. 280-286, Sep. 2012

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지