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Search : "[ keyword: 플라즈마 손상 ]" (1)
Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide
Jung JM  Lim KT
Vol. 16, No. 3, pp. 191-197, Sep. 2010

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지