Digital Library[ Search Result ]

Search : "[ keyword: 저유전상수 ]" (1)
Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide
Jung JM  Lim KT
Vol. 16, No. 3, pp. 191-197, Sep. 2010

Search
(IN TITLE, AUTHOR, ABSTRACT,KEYWORDS)

Advanced Search ▼

POPULAR KEYWORDS
(TOP 10 KEYWORDS)

Recent Publications
(LAST 3 YEARS)

pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지