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A Study on the Cleaning Characteristics according to the process gas of Low-Pressure Plasma
Koo HJ  Ko KJ  Chung CK
Vol. 7, No. 3, pp. 203-214, Sep. 2001

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지