Chung JK  Lee KY  Lee SG  Lee EM  Mo SH  Lee DK  Kim SG

10.7464/ksct.2017.23.2.181

Perfluorocompounds Pressure swing adsorption Porous media combustion Destruction and removal efficiency

The perfluorocompounds (PFCs) emitted from the semiconductor and display manufacture is treated by abatement systems which use various technologies, such as combustion, thermal, plasma, catalyst. However, it is required that the system should overcome their drawbacks with excess energy consumption and low removal efficiency. The new technology using combination of pressure swing adsorption and excess enthalpy combustion for the reduction of PFCs emissions were developed and analyzed its characteristics. PFCs concentration ratio and PFCs loss factor were calculated from measuring concentration of PFCs at the calculated by comparing concentration of PFCs at the combustor's inlet and outlet. There were performance evaluations with various gas flow for comparing energy consumption and removal efficiency with existing equipments. The concentration ratio and the loss factor of PFCs were 1.65, 8.2%, respectively, when the total gas flow of the pressure swing absorption (PSA) inlet was 204 liter per minute (LPM) and CF4 concentration was 1412 ppm. In comparison with existing system at constant condition, CF4 removal efficiency for a porous media combustion (PMC) showed the improvement more than 16% and the consumed energy was also reduced up to approximately 41%. Then, the total gas flow introduced into PMC and CF4 concentration were 91-LPM and 2335 ppm, respectively, and the destruction and removal efficiency of CF4 was about 96% at 19-LPM CH4, and 40-LPM O2.