A Study on environmental-friendly Cleaning for Si-wafers 


Vol. 6,  No. 1, pp. 79-84, Jun.  2000


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  Abstract

In this study, to reduce the consumption of chemicals in cleaning processes, Si-wafers contaiminated with metallic impurities were cleaned with electrolyzed water(EW), which was generated by the electrolysis of a diluted electrolyte solution or ultra pure water(UPW). Electrolyzed water could be controlled for obtaining wide ranges of pH and ORP(oxidation-reduction potential). The pH and oxidation-reduction potential of anode water and cathode water were measured to be 4.7 and +1000mV, and 6.3 and -550mV, respectively. To analyze the amount of metallic impurities on Si-wafer surfaces, ICP-MS was introduced. Anode water was effective for Cu removal, while cathode water was more effective for Fe removal.

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  Cite this article

[IEEE Style]

Y. H and R. K, "A Study on environmental-friendly Cleaning for Si-wafers," Clean Technology, vol. 6, no. 1, pp. 79-84, 2000. DOI: .

[ACM Style]

Yoon H and Ryoo K. 2000. A Study on environmental-friendly Cleaning for Si-wafers. Clean Technology, 6, 1, (2000), 79-84. DOI: .

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한국연구재단 등재학술지